SKKD No. 546/UN25.5.1/TU.3/2019 "Charactenstic of AIN Layer DepOsited by d .c. Magnetron Sputtering on AISI 410 steel"

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SKKD No. 546/UN25.5.1/TU.3/2019 "Charactenstic of AIN Layer DepOsited by d .c. Magnetron Sputtering on AISI 410 steel"

Jatisukamto, Gaguk; Malau, Viktor; Ilman, Noer; Iswanto, Priyo Tri
URI: http://ura.unej.ac.id/123456789/70020
Date: 2019-05-02

Abstract:

SKKD No. 546/UN25.5.1/TU.3/2019 "Charactenstic of AIN Layer DepOsited by d .c. Magnetron Sputtering on AISI 410 steel"

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